AMAT Applied Materials 0050-38614歧管 PDF資料
1.產 品 資 料 介 紹：
產品概述
AMAT Applied Materials 0050-38614 歧管（Weldment, Manifold, 5 Stat, Right, Nupro）是應用材料公司在半導體設備中使用的流體分配組件。它主要用于氣體或液體的多通道分配與控制，通常搭配真空系統(tǒng)、工藝氣路或清洗管路。該部件屬于焊接歧管組件，由多通道閥體及連接件組成，適用于高純氣體或腐蝕性工藝氣體。
技術參數(shù)（根據命名推測與行業(yè)常規(guī)）
結構形式：焊接歧管組件
通道數(shù)：5 通道（5 Station，通常指 5 個氣路站位）
安裝方向：右側安裝（Right 配置）
接口類型：Nupro 系列接口（常見于高純不銹鋼閥門與接頭）
材質：不銹鋼（適用于真空與半導體工藝氣體環(huán)境）
用途：氣體分配、隔離與切換
應用場景
半導體制造設備
CVD、PVD、Etch 等工藝腔體的氣體供應分配
清洗和吹掃氣路控制
真空系統(tǒng)
多通道氣體輸入或抽真空切換
化工與材料研究
高純氣體輸送與混合
實驗室自動化
精密流體控制與多路分配
產品優(yōu)勢
集成度高：5 通道集中在一個焊接歧管中，減少安裝空間。
密封可靠：Nupro 接口與焊接結構保證了高真空和高純環(huán)境下的氣密性。
耐腐蝕：不銹鋼材質可抵抗常見工藝氣體腐蝕。
方向明確：右側安裝便于設備內模塊化布置。
AMAT Applied Materials 0050-38614歧管 英文資料：
Product Overview
AMAT Applied Materials 0050-38614 manifold (Weldment, Manifold, 5 Stat, Right, Nupro) is a fluid distribution component used by Applied Materials in semiconductor equipment. It is mainly used for multi-channel distribution and control of gases or liquids, usually paired with vacuum systems, process gas circuits, or cleaning pipelines. This component belongs to the welded manifold assembly, consisting of a multi-channel valve body and connecting parts, suitable for high-purity gases or corrosive process gases.
Technical parameters (inferred from naming and industry conventions)
Structural form: welded manifold component
Number of channels: 5 channels (5 stations, usually referring to 5 gas station positions)
Installation direction: Right side installation (Right configuration)
Interface type: Nupro series interface (commonly used in high-purity stainless steel valves and fittings)
Material: Stainless steel (suitable for vacuum and semiconductor process gas environments)
Purpose: Gas distribution, isolation, and switching
Application scenarios
Semiconductor Manufacturing Equipment
Gas supply distribution for CVD, PVD, Etch and other process chambers
Cleaning and blowing air path control
vacuum system
Multi channel gas input or vacuum switching
Chemical and Materials Research
High purity gas transportation and mixing
Laboratory Automation
Precision fluid control and multi-channel distribution
Product advantages
High integration: 5 channels are concentrated in one welded manifold, reducing installation space.
Reliable sealing: The Nupro interface and welding structure ensure airtightness in high vacuum and high-purity environments.
Corrosion resistance: Stainless steel material can resist common process gas corrosion.
Clear direction: Installation on the right side facilitates modular layout within the equipment.
AMAT Applied Materials 0050-38614歧管 產品展示
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